Silazane is a silicon analogue of an amine with Si-N bond. It is an organic compound with unique properties and has a wide range of applications in the field of new materials, especially in the semiconductor industry. However, in the synthesis of silazane compounds, the reaction conditions are often very harsh. If the temperature and pressure are not properly controlled during the production process, it may lead to high impurities in the product. Therefore, accurate analysis of the purity of silazane compounds is an effective control of the production process and an important part of product quality control. It is crucial to accurately determine the impurity content in materials and determine the purity of silazanes. There are many methods for the analysis of the purity of silazanes, such as chromatography, thermal decomposition, thermogravimetric analysis, etc., but chromatography is a widely used method. The gas chromatography method is used to determine the purity of silazanes. The analysis process is simple and the analysis speed is fast. In this paper, according to the method of T/FSI 012-2017, after the optimization of the detection conditions, a GC-4100 gas chromatograph is established to detect the purity of tetramethyldivinyldisilazane and hexamethyldisilazane respectively. The method has good repeatability and high accuracy, which can be used for reference by relevant personnel. Attachment Download